Concepedia

Stewart Austin

SA

4

Publications

157

Citations

4

H-Index

1976

Active since

Affiliations

SUNY Polytechnic Institute(Current)

MIT Lincoln Laboratory

Massachusetts Institute of Technology

Stewart Austin is an author at SUNY Polytechnic Institute specializing in engineering, interferometry, and instrumentation.

Top concepts

EngineeringCalibrationInterferometryApplied PhysicsInstrumentationOptoelectronicsMaterial ScienceOptical AlignmentOptical MaterialsDigital Holography

Publications per year

1976–1978

4

Publications

4

A new interferometric alignment technique

D. C. Flanders, Henry I. Smith, Stewart Austin · Applied Physics Letters · 1977 · 75 citations

Engineering, Electron-beam Lithography, Beam Lithography +15

Fabrication of thin periodic structures in photoresist: a model

Stewart Austin, F. T. Stone · Applied Optics · 1976 · 40 citations

Holography, Optical Materials, Engineering +20

Alignment of x-ray lithography masks using a new interferometric technique—Experimental results

Stewart Austin, Henry I. Smith, D. C. Flanders · Journal of Vacuum Science and Technology · 1978 · 30 citations

Engineering, Electron-beam Lithography, Microscopy +17

Thin periodic structures in photoresist: fabrication and experimental evaluation

Stewart Austin, F. T. Stone · Applied Optics · 1976 · 12 citations

Transient Grating, Empirical Photoresist Model, Optical Materials +16

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