In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Analysis of tip deflection and force of a bimetallic cantilever microactuator

Wen-Hwa Chu, Mehran Mehregany, Robert L. Mullen · Journal of Micromechanics and Microengineering · 1993 · 250 citations

Engineering, Mechanical Engineering, Applied Mechanics +13

An electro-thermally and laterally driven polysilicon microactuator

Chi Shiang Pan, Wensyang Hsu · Journal of Micromechanics and Microengineering · 1997 · 152 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Hexsil tweezers for teleoperated micro-assembly

Chris G. Keller, Roger T. Howe · 2002 · 84 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Modelization and characterization of asymmetrical thermal micro-actuators

Ph. Lerch, C Kara Slimane, B. Romanowicz et al. · Journal of Micromechanics and Microengineering · 1996 · 82 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17