In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators - Concepedia

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In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators

31

Citations

16

References

2000

Year

Edward S. Kolesar, Simon Y. Ko, Jeffery T. Howard, Peter B. Allen, Josh M. Wilken, Noah C. Boydston, Matthew D. Ruff, Richard J. Wilks

Thin Solid Films

EngineeringMicrofabricationMechanicsMechanical EngineeringBiomimetic ActuatorActuationMicroactuatorIn-plane Tip DeflectionMicro-electromechanical System

References

	Year	Citations

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