Growth kinetics of nanoscale SiO2 layer in a nitric oxide (NO) ambient

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Generalized guide for MOSFET miniaturization

J.R. Brews, Wolf Fïchtner, E. H. Nicollian et al. · IEEE Electron Device Letters · 1980 · 356 citations

Engineering, Electrical Engineering, Materials Science +17

Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables

R. R. Razouk, Bruce E. Deal · Journal of The Electrochemical Society · 1979 · 238 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electrical characteristics of ultrathin oxynitride gate dielectric prepared by rapid thermal oxidation of Si in N2O

Hyunsang Hwang, Wenchi Ting, B. Maiti et al. · Applied Physics Letters · 1990 · 209 citations

Engineering, Materials Engineering, Materials Science +17

Nitridation of Silicon and Oxidized‐Silicon

Yoshinori Hayafuji, Kazuo Kajiwara · Journal of The Electrochemical Society · 1982 · 121 citations

Natural Sciences, Materials Engineering, Materials Science +17