8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE₀₁ Mode Microwave

Abstract

A new type of electron cyclotron resonance (ECR) plasma source has been developed using a circular TE 01 mode microwave converted from the principal TE 01 rectangular mode. The ion saturation current density of 36 mA/cm 2 is achieved for the input microwave power of 3 kW at the nitrogen gas pressure of 5×10 -4 Torr. The uniformity of the ion saturation current density is within ±3% over 8 inches in diameter, which is better than that produced by a conventional TE 11 mode microwave. The mean ion energy at the substrate position in this ECR plasma source is in the range of 20-30 eV, depending on the shape of magnetic fields