Description of the porosity of inhomogeneous porous low-k films using solvent adsorption studied by spectroscopic ellipsometry in the visible range

The Determination of Pore Volume and Area Distributions in Porous Substances. I. Computations from Nitrogen Isotherms

Elliott P. Barrett, Leslie G. Joyner, Paul P. Halenda · Journal of the American Chemical Society · 1951 · 13K citations

Natural Sciences, Chemistry, Analytical Chemistry +14

Determination of pore size distribution in thin films by ellipsometric porosimetry

Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations

Natural Sciences, Chemical Engineering, Materials Science +17

The Novel Improvement of Low Dielectric Constant Methylsilsesquioxane by  N 2 O  Plasma Treatment

Ting‐Chang Chang, Po‐Tsun Liu, Y. S. Mor et al. · Journal of The Electrochemical Society · 1999 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +16

Technique for characterization of thin film porosity

D. J. Taylor, Patrick F. Fleig, S.L. Hietala · Thin Solid Films · 1998 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +12

Development of the ultra-high-sensitive Kr adsorption technique to evaluate the pore-size distribution of thin-film materials

Hiroshi Yanazawa, Hironori Mastunaga, Hitoshi Itoh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 15 citations

Natural Sciences, Chemical Engineering, Materials Science +17