12
Publications
257
Citations
10
H-Index
1974
Active since
Affiliations
Hiroshi Yanazawa is an author at Hitachi (Japan) specializing in engineering, materials science, and microfabrication.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicrofabricationChemical EngineeringChemistryThin FilmsElectrical EngineeringMicroelectronics
Publications per year
1974–2017
12
12
Azide-phenolic resin photoresists for deep UV lithography
Takao Iwayanagi, T. Kohashi, Saburo Nonogaki et al. · IEEE Transactions on Electron Devices · 1981 · 55 citations
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1–5 of 12