Concepedia

Saburo Nonogaki

SN

15

Publications

376

Citations

11

H-Index

1958

Active since

Affiliations

Hitachi (Japan)(Current)

Saburo Nonogaki is an author at Hitachi (Japan) specializing in materials science, engineering, and chemistry.

Top concepts

EngineeringMaterial ScienceChemistryPolymer SciencePolymer ChemistryPhotochemistryApplied PhysicsPolymersOptical PropertiesMicrofabrication

Publications per year

1958–1994

15

Publications

15

Azide-phenolic resin photoresists for deep UV lithography

Takao Iwayanagi, T. Kohashi, Saburo Nonogaki et al. · IEEE Transactions on Electron Devices · 1981 · 55 citations

Materials Science, Uv Radiation, Engineering +13

Epoxide-Containing Polymers as Highly Sensitive Electron-Beam Resists

Takako Hirai, Yoshio Hatano, Saburo Nonogaki · Journal of The Electrochemical Society · 1971 · 50 citations

Materials Science, Conducting Polymer, Optical Materials +15

Polyvalent Anion-Exchange Resins Composed of Cross-Linked Polyethyleneimine Complexes of Heavy Metals

Saburo Nonogaki, Shoji Makishima, Yukio Yoneda · The Journal of Physical Chemistry · 1958 · 49 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +15

PGMA as a High Resolution, High Sensitivity Negative Electron Beam Resist

Yoshio Taniguchi, Yoshio Hatano, Hiroshi Shiraishi et al. · Japanese Journal of Applied Physics · 1979 · 39 citations

High Resolution, Engineering, Electron-beam Lithography +16

Iodinated polystyrene: An ion‐millable negative resist

Hiroshi Shiraishi, Y. Taniguchi, Shinkichi Horigome et al. · Polymer Engineering and Science · 1980 · 36 citations

Engineering, Responsive Polymers, Polymer Nanocomposites +16

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