Concepedia

Yoshio Hatano

YH

Statistics

Publications

2

Citations

89

H-Index

2

Active since

1971

Affiliations

Hitachi (Japan)(Current)

Yoshio Hatano is an author at Hitachi (Japan) specializing in polymer characterization, silicon, and materials science.

Publications per year

1971–1979

2

Publications

2

Epoxide-Containing Polymers as Highly Sensitive Electron-Beam Resists

Takako Hirai, Yoshio Hatano, Saburo Nonogaki · Journal of The Electrochemical Society · 1971 · 50 citations

, , +16

PGMA as a High Resolution, High Sensitivity Negative Electron Beam Resist

Yoshio Taniguchi, Yoshio Hatano, Hiroshi Shiraishi et al. · Japanese Journal of Applied Physics · 1979 · 39 citations

, , +13

1–2 of 2