Concepedia

T. Kohashi

TK

3

Publications

89

Citations

3

H-Index

1977

Active since

Affiliations

Hitachi (Japan)(Current)

T. Kohashi is an author at Hitachi (Japan) specializing in optical properties, engineering, and materials science.

Top concepts

Publications per year

1977–1981

3

Publications

3

Azide-phenolic resin photoresists for deep UV lithography

Takao Iwayanagi, T. Kohashi, Saburo Nonogaki et al. · IEEE Transactions on Electron Devices · 1981 · 55 citations

, , +13

Azide Photoresists for Deep U.V. Lithography

Takao Iwayanagi, T. Kohashi, Saburo Nonogaki · Journal of The Electrochemical Society · 1980 · 23 citations

, , +6

A water‐soluble, reciprocity‐law‐failing photoresist

Motoo Akagi, Saburo Nonogaki, T. Kohashi et al. · Polymer Engineering and Science · 1977 · 11 citations

, , +15

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