A novel electrostatic microactuator for large deflections in MEMS applications

Optical switching: switch fabrics, techniques, and architectures

G.I. Papadimitriou, Chrisoula Papazoglou, A.S. Pomportsis · Journal of Lightwave Technology · 2003 · 547 citations

Engineering, Computer Engineering, Electrical Engineering +17

Dynamic micromechanics on silicon: Techniques and devices

K. Petersen · IEEE Transactions on Electron Devices · 1978 · 391 citations

Engineering, Materials Engineering, Materials Science +16

MEMS technology for optical networking applications

A. Neukermans, R. Ramaswami · IEEE Communications Magazine · 2001 · 169 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +15

A resonantly excited 2D-micro-scanning-mirror with large deflection

Harald Schenk, Peter Dürr, Detlef Kunze et al. · Sensors and Actuators A Physical · 2001 · 108 citations

Engineering, Mechanical Engineering, Physics +8

Three-dimensional mems photonic cross-connect switch design and performance

Xuezhe Zheng, V. Kaman, Shifu Yuan et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2003 · 84 citations

Engineering, Electrical Engineering, Materials Science +17