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The effects of deposition temperature and ambient on the physical and electrical performance of DC-sputtered n-ZnO/p-Si heterojunction

Materials ScienceElectrical EngineeringDeposition TemperatureEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsDc-sputtered N-zno/p-si HeterojunctionElectrical PerformanceSemiconductor MaterialMicroelectronicsOptoelectronicsCompound SemiconductorSemiconductor Device