Concepedia
Microelectronic Engineering · 1990 · 13 citations · 9 references
EngineeringComputer EngineeringElectrical EngineeringComputer ArchitectureMicroelectronicsSemiconductor DevicesBuilt-in Self-testChip PackagingDesign For TestabilityDevice CharacterizationMemory Subsystem DesignTiming AnalysisFormal Hardware Verification
9
Simple simulation of electron-beam lithography for fabricating sub-0.2 μm T-shaped gates based on a two-layer resist system
D. Xu · Microelectronic Engineering · 1998 · 71 citations
Engineering, Electrical Engineering, Materials Science +13
Local field effects on voltage contrast in the scanning electron microscope
Koji Nakamae, Hiromu Fujioka, Katsumi Ura · Journal of Physics D Applied Physics · 1981 · 65 citations
Engineering, Electrical Engineering, Electromagnetics +15
High performance electron optical column for testing ICs with submicrometer design rules
J. Frosien, Erich Plies · Microelectronic Engineering · 1987 · 48 citations
Engineering, Computer Engineering, Electrical Engineering +13
Estimate of minimum measurable voltage in the SEM
A. Gopinath · Journal of Physics E Scientific Instruments · 1977 · 45 citations
Engineering, Electrical Engineering, Contrast Sensitivity +11
The limits of high-speed e-beam testing
B. Lischke, D. Winkler, R. Schmitt · Microelectronic Engineering · 1987 · 26 citations
Engineering, Aerospace Engineering, Experimental Performance +6