Statistics
Publications
3
Citations
39
H-Index
3
Active since
1990
Affiliations
Siemens (Germany)(Current)
Siegfried Görlich is an author at Siemens (Germany) specializing in engineering, electrical engineering, and electron beam physics.
Publications per year
1990–1992
3
3
Electron beam testing versus laser beam testing
Siegfried Görlich · Microelectronic Engineering · 1992 · 16 citations
Chip verification of 4 Mbit DRAMs by E-Beam testing
J. Kölzer, Mike Killian, Klaus Althoff et al. · Microelectronic Engineering · 1990 · 13 citations
Engineering, Computer Engineering, Electrical Engineering +10
1–3 of 3