On geometrical dependencies of capacitive coupling voltage contrast

Design for e-beam testability — A demand for e-beam testing of future device generations ?

K. Herrmann, E. Kubalek · Microelectronic Engineering · 1987 · 23 citations

Engineering, Electrical Engineering, Microelectronics +9

Planar and spherical retarding-field spectrometers for electron-beam testing: Evaluation and comparison

S. Görlich, P. Keβler, Erich Plies · Microelectronic Engineering · 1987 · 16 citations

Natural Sciences, Physics, Instrumentation +12

Some aspects concerning design for e-beam testability

K. Herrmann, E. Kubalek · Microelectronic Engineering · 1986 · 14 citations

Engineering, Electrical Engineering, Mechanical Engineering +8

Electron Beam Testing of Submicron Structures

J. Frosien, E. Kehrberg, M. Sturm et al. · Journal of The Electrochemical Society · 1988 · 10 citations

Engineering, Electrical Engineering, Physics +15