S. Görlich

Qualitative Research Methods for Large Language Models: Conducting Semi-Structured Interviews with ChatGPT and BARD on Computer Science Education

Andreas Dengel, Rupert Gehrlein, David Fernes et al. · Informatics · 2023 · 52 citations · Full text

Artificial Intelligence, Engineering, Education +24

Failure analysis of integrated devices by scanning thermal microscopy (SThM)

G.B.M. Fiege, Volker K. S. Feige, J.C.H. Phang et al. · Microelectronics Reliability · 1998 · 50 citations

Electrical Engineering, Engineering, Hardware Reliability +11

Planar and spherical retarding-field spectrometers for electron-beam testing: Evaluation and comparison

S. Görlich, P. Keβler, Erich Plies · Microelectronic Engineering · 1987 · 16 citations

Engineering, Electron-beam Testing, Physics +11

Surface photovoltage spectroscopy with cleaved GaAs (110) surfaces: Spectroscopy of Cr2+

Winfried Mönch, Helmut Clemens, S. Görlich et al. · Journal of Vacuum Science and Technology · 1981 · 15 citations

Engineering, Semiconductor Nanostructures, Semiconductors +17

Capacitive Coupling Voltage Contrast

S. Görlich, K. Herrmann, W. Reiners et al. · Digital Commons - USU (Utah State University) · 1986 · 13 citations · Full text