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A MoSi<sub>2</sub>Schottky diode for bipolar LSI's
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Citations
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References
1985
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringEngineeringBipolar LsiNanoelectronicsApplied PhysicsSemiconductor Device FabricationSchottky TtlMicroelectronicsOptoelectronicsSilicon On InsulatorSemiconductor Device
Fabrication and characterization of a molybdenum silicide Schottky diode have been investigated for its application to large-scale bipolar logic LSI's using a Schottky TTL. The diode consists of a silicon
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