Journal of Crystal Growth · 2003 · 28 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionOxide SemiconductorsSemiconductor Device MaterialsSemiconductor NanomaterialsSilicon MaterialsThermal Properties Of SemiconductorsOxide Film StabilitySemiconductor CharacterizationSemiconductor Oxide Thin FilmsSilicon DioxideThermal Stability
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