Concepedia

Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration

Daniel Rademacher, Tobias Zickenrott, Michael Vergöhl

Thin Solid Films · 2012 · 10 citations · 16 references

DOI

Concepts

References

16

XII. Colours in metal glasses and in metallic films

John C. Garnett · Philosophical Transactions of the Royal Society of London Series A Containing Papers of a Mathematical or Physical Character · 1904 · 4.3K citations

, , +17

Parameterization of the optical functions of amorphous materials in the interband region

G. E. Jellison, F. A. Modine · Applied Physics Letters · 1996 · 2.3K citations

, , +17

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

, , +12

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations

, , +10

Intrinsic stress in sputter-deposited thin films

H. Windischmann · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1992 · 644 citations

, , +14