Michael Vergöhl

Magnetron sputtering – Milestones of 30 years

Günter Bräuer, Bernd Szyszka, Michael Vergöhl et al. · Vacuum · 2010 · 402 citations

Magnetism, Engineering, Physics +5

Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films

B. Hunsche, Michael Vergöhl, H. Neuhäuser et al. · Thin Solid Films · 2001 · 59 citations

Materials Science, Optical Materials, Engineering +11

Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects

Bodo Henkel, Thomas A. Neubert, Sebastian Zabel et al. · Applied Catalysis B: Environmental · 2015 · 58 citations

Materials Science, Versus Evaporation, Engineering +9

Applications of HIPIMS metal oxides

V. Sittinger, O. Lenck, Michael Vergöhl et al. · Thin Solid Films · 2013 · 51 citations

Materials Engineering, Inorganic Chemistry, Chemical Engineering +6

Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO 2 and SiO 2 films for process control

Michael Vergöhl, N. Malkomes, Thorsten Staedler et al. · Thin Solid Films · 1999 · 48 citations

Materials Science, Sio 2, Ex Situ +10