Michael Vergöhl

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Active since

1996

Affiliations

Fraunhofer Institute for Surface Engineering and Thin Films(Current)

Fraunhofer-Gesellschaft

Ministry of Education

Coordenação de Aperfeicoamento de Pessoal de Nível Superior

Technische Universität Braunschweig

Michael Vergöhl is an author at Fraunhofer Institute for Surface Engineering and Thin Films specializing in materials engineering, natural sciences, and materials science.

Publications per year

1996–2017

Publications

Magnetron sputtering – Milestones of 30 years

Bernd Szyszka, Michael Vergöhl, Ralf Bandorf · Vacuum · 2010 · 410 citations

Natural Sciences, Materials Science, Physics +5

Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films

B. Hunsche, Michael Vergöhl, H. Neuhäuser et al. · Thin Solid Films · 2001 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +16

Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects

Bodo Henkel, Thomas A. Neubert, Sebastian Zabel et al. · Applied Catalysis B: Environmental · 2015 · 58 citations

Natural Sciences, Materials Engineering, Materials Science +17

Applications of HIPIMS metal oxides

V. Sittinger, O. Lenck, Michael Vergöhl et al. · Thin Solid Films · 2013 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO 2 and SiO 2 films for process control

Michael Vergöhl, N. Malkomes, Thorsten Staedler et al. · Thin Solid Films · 1999 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

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