Magnetron sputtering – Milestones of 30 years

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

Natural Sciences, Materials Science, Physics +7

Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

Steffen Jäger, Bernd Szyszka, J. Szczyrbowski · Surface and Coatings Technology · 1998 · 165 citations

Natural Sciences, Materials Engineering, Materials Science +13

Hot target sputtering: A new way for high-rate deposition of stoichiometric ceramic films

D. Mercs, F. Perry, Alain Billard · Surface and Coatings Technology · 2006 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +16

Design advances and applications of the rotatable cylindrical magnetron

Michael Wright, Terry Beardow · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +12

A highest rate self-sputtering magnetron source

R. Kukla, T. Krug, Ryan Ludwig et al. · Vacuum · 1990 · 54 citations

Natural Sciences, Materials Science, Physics +5