Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 43 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicrofabricationForce SensingMems ActuatorsPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsScanning Probe MicroscopyAmplitude Of VibrationFabricationLead Zirconate TitanateMicroscale Piezoelectric DevicesMicroscopyPiezoelectric Cantilever ActuatorsPiezoelectric SensingSensitivity
In this article we report the structure and the microfabrication method of a novel micro-scanning force microscopy (SFM) device. It is a lead zirconate titanite (PZT) bimorph structure in the shape of a cantilever supported by bridges. Electric fields applied to the separated sections of the electrodes on the levers can induce lever deflection and actuate the tip in x, y, and z directions. The cantilever can vibrate and sense its own vibration amplitude to detect the surface topography in the cyclic contact SFM mode. In the fabrication process, the sol–gel method is modified for constructing high quality PZT films 3 μm thick. The single bridge device has shown microscopy sensitivity of 0.32 nA/nm in a vertical direction, with actuation sensitivities of 70–80 nm/V in a lateral direction. The multibridged structure has been proven to be effective in elevating the eigenfrequency, which is very important for improving the SPM data rate.
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