Concepedia
Statistics
Publications
9
Citations
242
H-Index
Active since
1997
Affiliations
The University of Tokyo(Current)
Seiko Holdings (Japan)
University of Science and Technology of China
Jiaru Chu is an author at The University of Tokyo specializing in engineering, materials science, and mechanical engineering.
Top concepts
EngineeringMaterial ScienceMechanical EngineeringApplied PhysicsMicrofabricationMicroscopyThin FilmsPiezoelectric MaterialsVibrationInstrumentation
Publications per year
1997–2008
Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror
Xiaohui Xu, Baoqing Li, Feng Yan et al. · Journal of Micromechanics and Microengineering · 2007 · 58 citations
Materials Science, Engineering, Micromachines +11
Deposition and Patterning Technique for Realization of Pb(Zr<sub>0.52</sub>, Ti<sub>0.48</sub>)O<sub>3</sub> Thick Film Micro Actuator
Ryutaro Maeda, Zhan Jie Wang, Jiaru Chu et al. · Japanese Journal of Applied Physics · 1998 · 43 citations
Engineering, Mechanical Engineering, Microactuator +18
Novel multibridge-structured piezoelectric microdevice for scanning force microscopy
Jiaru Chu, Z. Wang, Ryutaro Maeda et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 43 citations
Engineering, Microscopy, Mechanical Engineering +19
Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS
Xiaohui Xu, Jiaru Chu · Journal of Micromechanics and Microengineering · 2008 · 28 citations
Engineering, Material Innovation, Thin Film Process Technology +17
Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method
Jiaru Chu, Toshihiro Itoh, Chengkuo Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 23 citations
Materials Science, Vibrations, Force Microscope +14
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