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High rate growth of microcrystalline silicon by VHF-GD at high pressure

U. Graf, J. Meier, U. Kroll, J. Bailat, C. Droz, E. Vallat‐Sauvain, A.H. Shah

Thin Solid Films · 2003 · 92 citations · 7 references

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7

High rate growth of microcrystalline silicon at low temperatures

Michio Kondo, Makoto Fukawa, Lihui Guo et al. · Journal of Non-Crystalline Solids · 2000 · 294 citations

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High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition

Lihui Guo, Michio Kondo, Makoto Fukawa et al. · Japanese Journal of Applied Physics · 1998 · 223 citations

, , +17

High rate growth of microcrystalline silicon using a high-pressure depletion method with VHF plasma

Makoto Fukawa, Susumu Suzuki, Lihui Guo et al. · Solar Energy Materials and Solar Cells · 2001 · 107 citations

, , +17

Towards high-efficiency thin-film silicon solar cells with the “micromorph” concept

J. Meier, S. Dubail, R. Platz et al. · Solar Energy Materials and Solar Cells · 1997 · 102 citations

, , +14

Recent Developments in the use of the Tripod Polisher for TEM Specimen Preparation

J. Benedict, Ron Anderson, Stanley J. Klepeis · MRS Proceedings · 1991 · 91 citations

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