Applied Physics Letters · 2006 · 55 citations · 14 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsGas SensorsMems ResonatorsMems SensorsMicroelectromechanical SensorsMicrofluidic SystemsMicrofluidicsDampingDamping MechanismsMicroresonatorsMolar MassPiezoresistive SensingPiezoresistive SensorsResonant FrequencyViscous Damping
The damping effect of various gas environments on a silicon, lateral microresonator implemented with piezoresistive detection is investigated in this study. The resonant frequency of the cantilever shifts due to viscous damping by an amount that is directly determined by the molar mass of the gas, thereby providing a method to determine the composition of the gas environment. In addition, the microresonator demonstrates the ability to perform CO2 composition analysis using this nonreaction based detection method. The advantages of this gas analysis method are that it is simple, repeatable, reversible and not limited to reactive gases.
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Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text
Engineering, Mechanical Engineering, Microelectromechanical Systems +16
Detection of mercury vapor using resonating microcantilevers
Thomas Thundat, Eric A. Wachter, S. L. Sharp et al. · Applied Physics Letters · 1995 · 435 citations