Anodic bonding of glass to aluminium

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

Natural Sciences, Materials Engineering, Materials Science +7

Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors

Tony Rogers, Jan Kowal · Sensors and Actuators A Physical · 1995 · 187 citations

Engineering, Materials Engineering, Materials Science +16

Helium Diffusion through Glass

V. O. Altemose · Journal of Applied Physics · 1961 · 150 citations

Natural Sciences, Chemistry, Materials Science +8

Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates

Thomas M. H. Lee, Debbie H.Y Lee, Connie Y.N Liaw et al. · Sensors and Actuators A Physical · 2000 · 100 citations

Natural Sciences, Materials Engineering, Materials Science +14