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Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors

Materials ScienceGlass-ceramicEngineeringSensorsMicrofabricationFlexible ElectronicsApplied PhysicsGlass MaterialFunctional GlassSensor DesignAnodic Bonding ConditionsMicroelectronicsSilicon-glass Capacitive SensorsSensor TechnologyMaterial Compatibility