Future of actuators and microsystems

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 737 citations

Engineering, Materials Engineering, Materials Science +6

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 296 citations

Engineering, Materials Science, Mechanical Engineering +17

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations