Concepedia

Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD

J. C. Rostaing, B. Drévillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev

Thin Solid Films · 1993 · 38 citations · 9 references

DOI

Concepts

References

9

Optical properties of thin films

D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations

, , +14

Ion-based methods for optical thin film deposition

Philip Martin · Journal of Materials Science · 1986 · 332 citations

, , +13

Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini · Physical review. B, Condensed matter · 1986 · 307 citations

, , +17

Determination of optical constants of thin film coating materials based on inverse synthesis

J. A. Dobrowolski, F. C. Ho, A. Waldorf · Applied Optics · 1983 · 203 citations

, , +17

Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers

W. A. P. Claassen, W. G. J. N. Valkenburg, M. F. C. Willemsen et al. · Journal of The Electrochemical Society · 1985 · 191 citations

, , +15