J. Y. Parey

A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition

Pere Roca I Cabarrocas, J.B. Chevrier, J. Huc et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 232 citations · Full text

Natural Sciences, Materials Engineering, Physics +15

Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD

J. C. Rostaing, B. Drévillon, R. Etemadi et al. · Thin Solid Films · 1993 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

Dual-plasma reactor for low temperature deposition of wide band-gap silicon alloys

R. Etemadi, C. Godet, J. Perrin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 32 citations

Natural Sciences, Materials Science, Physics +16

Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD

A. R. Middya, Ana Lloret, J. Perrin et al. · MRS Proceedings · 1995 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +16

In-Situ Excimer Laser Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films

N. Layadi, Pere Roca i Cabarrocas, J. Huc et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1994 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +14