J. Perrin

Cross‐Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry

J. Perrin, O. Leroy, Marie‐Claude Bordage · Contributions to Plasma Physics · 1996 · 350 citations

Natural Sciences, Chemistry, Physics +17

Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon

Akihisa Matsuda, Katsuhiko Nomoto, Yoshiaki Takeuchi et al. · Surface Science · 1990 · 262 citations

Natural Sciences, Chemistry, Materials Science +13

Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharges

Christian Böhm, J. Perrin · Review of Scientific Instruments · 1993 · 248 citations

Natural Sciences, Electrical Engineering, Physics +14

Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH4 discharges

J. Perrin, Masaharu Shiratani, Patrick Kae-Nune et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 231 citations

Natural Sciences, Chemistry, Materials Science +17

Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis

B. Drévillon, J. Perrin, R. Marbot et al. · Review of Scientific Instruments · 1982 · 209 citations

Engineering, Computer Engineering, Electrical Engineering +17