Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon - Concepedia

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Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon

262

Citations

21

References

1990

Year

Akihisa Matsuda, Katsuhiko Nomoto, Yoshiaki Takeuchi, Atsushi Suzuki, Akimasa Yuuki, J. Perrin

Surface Science

Materials ScienceSilyl RadicalsLoss ProbabilitiesEngineeringPhysicsSurface ScienceApplied PhysicsTemperature DependenceAmorphous SolidSilicon On InsulatorSilicon Debugging

References

	Year	Citations

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