Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon

Adsorption of atomic hydrogen on clean cleaved silicon (111)

G Schulze, M. Henzler · Surface Science · 1983 · 350 citations

Natural Sciences, Chemistry, Materials Science +12

Film formation mechanisms in the plasma deposition of hydrogenated amorphous silicon

C. C. Tsai, J. C. Knights, Guanghong Chang et al. · Journal of Applied Physics · 1986 · 227 citations

Engineering, Materials Engineering, Materials Science +17

Mono- and disilicon radicals in silane and silane-argon dc discharges

Robert M. Robertson, Alan Gallagher · Journal of Applied Physics · 1986 · 196 citations

Natural Sciences, Chemistry, Materials Science +7

Guiding principle for preparing highly photosensitive Si-based amorphous alloys

Akihisa Matsuda, Kazunobu Tanaka · Journal of Non-Crystalline Solids · 1987 · 172 citations

Natural Sciences, Materials Engineering, Materials Science +12

Glow-discharge amorphous silicon: Growth process and structure

Kazunobu Tanaka, Akihisa Matsuda · Materials Science Reports · 1987 · 171 citations

Engineering, Materials Engineering, Materials Science +13