R. Etemadi

Possible routes for cluster growth and particle formation in RF silane discharges

J. Perrin, C. Bohm, R. Etemadi et al. · Plasma Sources Science and Technology · 1994 · 121 citations

Natural Sciences, Chemistry, Physics +14

The origin of visible photoluminescence from silicon oxide thin films prepared by dual-plasma chemical vapor deposition

Min Zhu, Yulei Han, Ralf B. Wehrspohn et al. · Journal of Applied Physics · 1998 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +17

Multitube surface-wave discharges for increased gas throughput at atmospheric pressure

Michel Moisan, Z. Zakrzewski, R. Etemadi et al. · Journal of Applied Physics · 1998 · 45 citations

Natural Sciences, Electrical Engineering, Physics +16

Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD

J. C. Rostaing, B. Drévillon, R. Etemadi et al. · Thin Solid Films · 1993 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

Dual-plasma reactor for low temperature deposition of wide band-gap silicon alloys

R. Etemadi, C. Godet, J. Perrin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 32 citations

Natural Sciences, Materials Science, Physics +16