Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD

X-ray diffraction procedures

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Determination of activation energies for diamond growth by an advanced hot filament chemical vapor deposition method

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Investigation of polycrystalline silicon deposition on glass substrates

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Hot filament assisted deposition of silicon nitride thin films

Sadanand V. Deshpande, Jeffrey L. Dupuie, Erdoḡan Gülari · Applied Physics Letters · 1992 · 26 citations · Full text

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