Concepedia

Eiichi Kondoh

EK

Statistics

Publications

47

Citations

1.4K

H-Index

22

Active since

1991

Affiliations

University of Yamanashi(Current)

Nippon Steel (Japan)

Nagoya University

Eiichi Kondoh is an author at University of Yamanashi specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemical EngineeringChemistryThin FilmsMaterials EngineeringMicrofabricationChemical Kinetics

Publications per year

1991–2021

47

Publications

47

Characteristics of copper deposition in a supercritical CO2 fluid

Eiichi Kondoh, Hatsuhiro Kato · Microelectronic Engineering · 2002 · 87 citations

Materials Science, Chemical Engineering, Copper Deposition +4

Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide

Eiichi Kondoh · Japanese Journal of Applied Physics · 2004 · 77 citations

Nanosheet, Engineering, Nanoporous Material +16

Effect of oxygen plasma exposure of porous spin-on-glass films

Eiichi Kondoh, Takanori Asano, Akira Nakashima et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 74 citations

Materials Science, Chemical Engineering, Plasma Exposure +13

Determination of activation energies for diamond growth by an advanced hot filament chemical vapor deposition method

Eiichi Kondoh, Tomohiro Ohta, Tohru Mitomo et al. · Applied Physics Letters · 1991 · 72 citations

Materials Engineering, Materials Science, Chemical Engineering +12

Surface reaction kinetics of gas-phase diamond growth

Eiichi Kondoh, Tomohiro Ohta, Tohru Mitomo et al. · Journal of Applied Physics · 1993 · 66 citations

Materials Science, Diamond-like Carbon, Chemical Engineering +12

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