Hysteresis effects in the sputtering process using two reactive gases

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

Materials Engineering, Materials Science, Gas Injection +8

Process modeling of reactive sputtering

S. Berg, Hans‐Olof Blom, Mona Moradi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 102 citations

Electrical Engineering, Engineering, Industrial Engineering +12

Reactive sputtering using two reactive gases, experiments and computer modeling

Patrik Carlsson, C. Nender, Hana Baránková et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 68 citations

Materials Science, Chemical Engineering, Reactive Gases +11

Pressure stability in reactive magnetron sputtering

A.G. Spencer, R.P. Howson, R Lewin · Thin Solid Films · 1988 · 60 citations

Magnetism, Spintronics, Engineering +7

Dynamic control of reactive magnetron sputtering: A theoretical analysis

A.G. Spencer, R.P. Howson · Thin Solid Films · 1990 · 23 citations

Magnetism, Engineering, Magnetic Data Storage +5