Hysteresis effects in the sputtering process using two reactive gases

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	Year	Citations
Modeling of reactive sputtering of compound materials S. Berg, Hans‐Olof Blom, T. Larsson, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials EngineeringMaterials ScienceGas InjectionEngineeringMechanical Engineering	1987	373
Process modeling of reactive sputtering S. Berg, Hans‐Olof Blom, Mona Moradi, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Electrical EngineeringEngineeringIndustrial EngineeringProcess Simulation ModelProcess Control	1989	102
Reactive sputtering using two reactive gases, experiments and computer modeling Patrik Carlsson, C. Nender, Hana Baránková, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceChemical EngineeringReactive GasesEngineeringReactive Sputtering Process	1993	68
Pressure stability in reactive magnetron sputtering A.G. Spencer, R.P. Howson, R Lewin Thin Solid Films MagnetismSpintronicsEngineeringMagnetic Data StoragePhysics	1988	60
Dynamic control of reactive magnetron sputtering: A theoretical analysis A.G. Spencer, R.P. Howson Thin Solid Films MagnetismEngineeringMagnetic Data StorageProcess ControlMagnetohydrodynamics	1990	23

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