Ultra-high density MEMS probe memory device

John Heck, Donald E. Adams, Nickolai Belov, Tsung-Kuan A. Chou, Byong Kim, K. Kornelsen, Qing Ma, Valluri Rao, S. Severi, D. F. Spicer,

Microelectronic Engineering · 2009 · 16 citations · 8 references

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