Concepedia

Publication | Closed Access

Ultra-high density MEMS probe memory device

DOI

16

Citations

8

References

2009

Year

John Heck, Donald E. Adams, Nickolai Belov, Tsung-Kuan A. Chou, Byong Kim, K. Kornelsen, Qing Ma, Valluri Rao, S. Severi, D. F. Spicer,
Microelectronic Engineering

References

YearCitations

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