The influence of surface oxidation on the pH-sensing properties of silicon nitride

Operation of chemically sensitive field-effect sensors as a function of the insulator-electrolyte interface

Luc Bousse, Ν. F. de Rooij, P. Bergveld · IEEE Transactions on Electron Devices · 1983 · 573 citations

Natural Sciences, Chemistry, Electrical Engineering +17

Ion-sensing devices with silicon nitride and borosilicate glass insulators

D.L. Harame, Luc Bousse, J. Shott et al. · IEEE Transactions on Electron Devices · 1987 · 221 citations

Natural Sciences, Electrical Engineering, Materials Science +15

Comparison of the hysteresis of Ta2O5 and Si3N4 pH-sensing insulators

Luc Bousse, Shahriar Mostarshed, B. van der Schoot et al. · Sensors and Actuators B Chemical · 1994 · 180 citations

Engineering, Materials Engineering, Materials Science +9

The pH-sensing properties of tantalum pentoxide films fabricated by metal organic low pressure chemical vapor deposition

Thomas Mikolajick, R Kühnhold, H. Ryssel · Sensors and Actuators B Chemical · 1997 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +12

The Composition and Physical Properties of LPCVD Silicon Nitride Deposited with Different  NH 3 / SiH2Cl2 Gas Ratios

Paihung Pan, Wayne S. Berry · Journal of The Electrochemical Society · 1985 · 51 citations

Engineering, Materials Engineering, Materials Science +17