Atomic layer epitaxy of AlP and its application to X-ray multilayer mirror

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92

B. L. Henke, Eric M. Gullikson, J.C. Davis · Atomic Data and Nuclear Data Tables · 1993 · 6.2K citations

Natural Sciences, Chemistry, Physics +12

Molecular Layer Epitaxy

Jun‐ichi Nishizawa, Hitoshi Abe, Toru Kurabayashi · Journal of The Electrochemical Society · 1985 · 314 citations

Natural Sciences, Materials Engineering, Materials Science +17

Molybdenum-silicon multilayer mirrors for the extreme ultraviolet

Troy W. Barbee, Stanley Mrowka, Michael C. Hettrick · Applied Optics · 1985 · 216 citations

Natural Sciences, Materials Science, Physics +17

Atomic-layer growth of GaAs by modulated-continuous-wave laser metal-organic vapor-phase epitaxy

Yoshinobu Aoyagi, Atsutoshi Doi, Souhachi Iwai et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 70 citations

Engineering, Materials Engineering, Materials Science +13

Pulsed jet epitaxy of III–V compounds

M. Ozeki, N. Ohtsuka, Yoshiki Sakuma et al. · Journal of Crystal Growth · 1991 · 38 citations

Engineering, Materials Engineering, Materials Science +6