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Atomic layer epitaxy of AlP and its application to X-ray multilayer mirror

Materials ScienceAluminium NitrideEngineeringX-ray Multilayer MirrorPhysicsAtomic Layer EpitaxyOptical PropertiesSurface ScienceApplied PhysicsX-ray DiffractionMolecular Beam EpitaxyEpitaxial GrowthDepth-graded Multilayer Coating