Texture and phase transformation of sputter-deposited metastable Ta films and multilayers - Concepedia

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Texture and phase transformation of sputter-deposited metastable Ta films and multilayers

90

Citations

8

References

1996

Year

R. Hoogeveen, M. Moske, H. Geisler, K. Samwer

Thin Solid Films

Materials ScienceMaterial AnalysisEngineeringPhysicsNanotechnologySurface ScienceApplied PhysicsPhase TransformationThin FilmsChemical Vapor DepositionDepth-graded Multilayer CoatingThin Film Processing

References

	Year	Citations

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