Formation of titanium silicide during rapid thermal annealing: Influence of oxygen

Abstract

Rapid thermal annealing of Ti/Si couples has been investigated by transmission electron microscopy using cross-section preparation, four-point probe measurement of sheet resistance, and Auger electron spectroscopy. The development of crystalline phases was determined in this way with high spatial and temporal resolution. Our results indicate the decisive influence of the solubility of oxygen on the phase sequence.