G. G. Bentini

Effect of low dose high energy O3+ implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: Planar optical waveguide formation and characterization

G. G. Bentini, M. Bianconi, Marco Chiarini et al. · Journal of Applied Physics · 2002 · 149 citations

Short Wavelength Optic, Optical Materials, Engineering +18

Defects introduced in silicon wafers during rapid isothermal annealing: Thermoelastic and thermoplastic effects

G. G. Bentini, L. Correrá, C. Donolato · Journal of Applied Physics · 1984 · 113 citations

Engineering, Silicon On Insulator, Defect Tolerance +21

Titanium silicide formation: Effect of oxygen distribution in the metal film

M. Berti, A. V. Drigo, C. M. S. Cohen et al. · Journal of Applied Physics · 1984 · 102 citations

Engineering, Oxidation Resistance, Solid-state Chemistry +17

Damage effects produced in the near-surface region of x-cut LiNbO3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions

G. G. Bentini, M. Bianconi, L. Correrá et al. · Journal of Applied Physics · 2004 · 94 citations

Materials Science, Defect Tolerance, Damage Pileup +13

Growth and structure of titanium silicide phases formed by thin Ti films on Si crystals

G. G. Bentini, Roberta Nipoti, A. Armigliato et al. · Journal of Applied Physics · 1985 · 64 citations

Engineering, Integrated Circuits, Annealing Time +18