Diffusion profile of spin-on dopant in silicon substrate

Resistivity of Bulk Silicon and of Diffused Layers in Silicon

J.C. Irvin · Bell System Technical Journal · 1962 · 699 citations

Engineering, Electrical Engineering, Materials Science +17

A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip Effect

Richard B. Fair, J. C. C. Tsai · Journal of The Electrochemical Society · 1977 · 343 citations · Full text

Engineering, Materials Science, Physics +17

Micro-electronics - processing and device design

G.W.A.D · Microelectronics Reliability · 1981 · 61 citations

Engineering, Computer Engineering, Electrical Engineering +12

Alteration of diffusion profiles in semiconductors due to p-n junctions

P.J. Anthony · Solid-State Electronics · 1982 · 14 citations

Engineering, Materials Engineering, Materials Science +14