Microelectronics Reliability · 1981 · 61 citations · 0 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationDevice ModelingIntegrated Circuit DesignIntegrated Circuit DevicesMems DesignMems FabricationMicrofabrication ProcessesMems Device PackagingMicroelectromechanical System FabricationMicrofabrication Process Integration