Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media

Abstract

This letter reports on higher orders of an advanced out-of-plane bending mode in aluminium-nitride (AlN)-actuated cantilever plates achieving the highest quality factors (Q-factor) of cantilever-based MEMS (micro electromechanical system) resonators in liquids up to now. Devices based on a 20 μm thick silicon cantilever were fabricated and characterised by optical and electrical measurements in air and in different liquids. Furthermore, finite element method eigenmode analyses were performed, showing an excellent agreement with the measured mode shape and the electrical characteristics. The highest Q-factor was achieved in deionised water with Q = 366, operated at the 10th order mode at a resonance frequency less than 4 MHz. This is the highest value ever measured in liquid media with a cantilever-based MEMS resonator up to now and exceeds the Q-factors of state of the art resonators in liquids in the given resonance frequency range by a factor of about 4. Furthermore, the strain related conductance peak of the multi roof tile-shaped modes is superior, showing great potential for further electrode design optimisation. Compared to common out-of-plane bending modes, this combination of most beneficial properties is unique, making this type of vibration mode the first choice for a large variety of resonator-based liquid-phase sensing applications.