Achim Bittner

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Wenbo Wang, P. M. Mayrhofer, Xingli He et al. · Applied Physics Letters · 2014 · 121 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode

Martin Kučera, E. Wistrela, Georg Pfusterschmied et al. · Sensors and Actuators B Chemical · 2014 · 66 citations

Engineering, Self-sensing Piezoelectric-aln Cantilevers, Microfabrication +10

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

A. Ababneh, Mohammed Alsumady, H. Seidel et al. · Applied Surface Science · 2012 · 58 citations

Materials Science, Aluminium Nitride, Engineering +8

Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes

Martin Kučera, E. Wistrela, Georg Pfusterschmied et al. · Applied Physics Letters · 2014 · 52 citations · Full text

Electrical Engineering, Aluminum-nitride-actuated Self-sensing Micro-resonators, Engineering +13

ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

P. M. Mayrhofer, C. Rehlendt, Martin Fischeneder et al. · Journal of Microelectromechanical Systems · 2016 · 50 citations

Scaln Mems Cantilevers, Engineering, Energy Conversion +21