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Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode

EngineeringSelf-sensing Piezoelectric-aln CantileversMicrofabricationMechanicsLiquid MediaMechanical EngineeringApplied PhysicsPiezoelectric NanogeneratorsPiezoelectricityPiezoelectric MaterialFlexible SensorDesign-dependent PerformanceMicro-electromechanical System