Distortion-free measurement of electric field strength with a MEMS sensor

Andreas Kainz, Harald Steiner, J. Schalko, +6

Nature Electronics

Electrical EngineeringMems SensorEngineeringMeasurementNano Electro Mechanical System +7

On the Stacking Behavior of Functionalized Single-Wall Carbon Nanotubes

Ákos Kukovecz, Ch. Kramberger, Michael Holzinger, +4

The Journal of Physical Chemistry B

NanosheetEngineeringSingle-wall Carbon NanotubesChemistrySpectra-structure Correlation +15

Fracture and Delamination of Chromium Thin Films on Polymer Substrates

Megan J. Cordill, Aidan A. Taylor, J. Schalko, +1

Metallurgical and Materials Transactions A

EngineeringMechanical EngineeringFilm FractureChromium Thin FilmsStressstrain Analysis +16

Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode

Martin Kučera, E. Wistrela, Georg Pfusterschmied, +8

Sensors and Actuators B Chemical

EngineeringSelf-sensing Piezoelectric-aln CantileversMicrofabricationMechanicsLiquid Media +8

Silicon microcavity arrays with open access and a finesse of half a million

Georg Wachter, Stefan Kühn, Stefan Minniberger, +10

Light Science & Applications

A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout

Christian Riesch, Erwin K. Reichel, A. Jachimowicz, +4

Journal of Micromechanics and Microengineering

EngineeringMechanical EngineeringDevice DesignerAcoustic SensorSensor Technology +17

Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes

Martin Kučera, E. Wistrela, Georg Pfusterschmied, +6

Applied Physics Letters

Electrical EngineeringAluminum-nitride-actuated Self-sensing Micro-resonatorsEngineeringVibrationsMicrofabrication +11

An elevated temperature study of a Ti adhesion layer on polyimide

Aidan A. Taylor, Megan J. Cordill, L. Bowles, +2

Thin Solid Films

EngineeringMechanical EngineeringTi Adhesion LayerBuckle DimensionsTitanium Layers +16

Robust Precision Position Detection With an Optical MEMS Hybrid Device

Wilfried Hortschitz, Harald Steiner, Matthias Sachse, +6

IEEE Transactions on Industrial Electronics

EngineeringMeasurementVibration MeasurementEducationSensor Technology +17

Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonator

Samir Ćerimović, Roman Beigelbeck, H. Antlinger, +3

Microsystem Technologies

EngineeringVibrationsSensorsMicrofabricationMicromachines +12