Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing

Tomás Manzaneque, Víctor Ruiz-Díez, J. Hernando, +4

Sensors and Actuators A Physical

EngineeringMicrofabricationMechanical EngineeringNano Electro Mechanical SystemViscosity Sensing +2

Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode

Martin Kučera, E. Wistrela, Georg Pfusterschmied, +8

Sensors and Actuators B Chemical

EngineeringSelf-sensing Piezoelectric-aln CantileversMicrofabricationMechanicsLiquid Media +8

Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes

Martin Kučera, E. Wistrela, Georg Pfusterschmied, +6

Applied Physics Letters

Electrical EngineeringAluminum-nitride-actuated Self-sensing Micro-resonatorsEngineeringVibrationsMicrofabrication +11

ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

P. M. Mayrhofer, C. Rehlendt, Martin Fischeneder, +4

Journal of Microelectromechanical Systems

Scaln Mems CantileversEngineeringEnergy ConversionMechanical EngineeringPiezoelectric Energy +19

Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids

Georg Pfusterschmied, Martin Kučera, E. Wistrela, +5

Journal of Micromechanics and Microengineering

EngineeringMechanical EngineeringMicro-electromechanical SystemFluid PropertiesMicromachines +15

Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators

Markus Piller, Johannes Hiesberger, E. Wistrela, +3

IEEE Sensors Journal

Optical MaterialsEngineeringThermal Ir DetectorsIntegrated CircuitsSensor Technology +17

Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media

Martin Kučera, E. Wistrela, Georg Pfusterschmied, +5

Applied Physics Letters

EngineeringCantilever PlatesMechanical EngineeringMicroactuatorSensor Technology +14

Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel

J. Toledo, Tomás Manzaneque, Víctor Ruiz-Díez, +6

Microsystem Technologies

Real-time MonitoringEngineeringSensorsMicrofabricationMechanical Engineering +7

Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids

J. Toledo, Tomás Manzaneque, Víctor Ruiz-Díez, +5

Journal of Micromechanics and Microengineering

Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators

Martin Kučera, Franz Hofbauer, E. Wistrela, +5

Microsystem Technologies

Lock-in AmplifierAnalogue Q-control CircuitPiezoelectric NanogeneratorsMechatronicsNano Electro Mechanical System +3