P. M. Mayrhofer

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Wenbo Wang, P. M. Mayrhofer, Xingli He et al. · Applied Physics Letters · 2014 · 122 citations

Natural Sciences, Materials Engineering, Materials Science +15

ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

P. M. Mayrhofer, C. Rehlendt, Martin Fischeneder et al. · Journal of Microelectromechanical Systems · 2016 · 51 citations

Engineering, Materials Engineering, Materials Science +17

Circular test structure for the determination of piezoelectric constants of Sc x Al 1−x N thin films applying Laser Doppler Vibrometry and FEM simulations

P. M. Mayrhofer, Holger Euchner, Achim Bittner et al. · Sensors and Actuators A Physical · 2014 · 41 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

P. M. Mayrhofer, C. Eisenmenger‐Sittner, Michael Stöger‐Pollach et al. · Journal of Applied Physics · 2014 · 35 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading

P. M. Mayrhofer, Per O. Å. Persson, Achim Bittner et al. · Microsystem Technologies · 2015 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +15