Sensors and Actuators A Physical · 2014 · 96 citations · 40 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsMems DesignMems MaterialsMems ResonatorsMems SensorsMicroelectromechanical SensorsPiezoelectric ActuatorsMass SensingMicromechanical OscillatorsPiezoelectric ResonatorsViscosityViscosity Measurement
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The Mean Square Successive Difference
J. v. Neumann, R. H. Kent, H. R. Bellinson et al. · The Annals of Mathematical Statistics · 1941 · 535 citations · Full text
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text
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